ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,821, issued on Nov. 3, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Actuator unit for positioning an optical element" was invented by Sjoerd Martijn Huiberts (Best, Netherlands), Rene Josephus Johannes Van Der Meulen (Etten-Leur, Netherlands) and Johannes Petrus Martinus Bernardus Vermeulen (Leende, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is an actuator unit for positioning an optical element including a reluctance actuator comprising a first stator part and a first mover part that are separated by a gap with respect to each other in a first direction. The first mover part is configured to move the opt...