US Patent Issued to ASML Netherlands on May 5 for "Dynamic determination of a sample inspection recipe of charged particle beam inspection" (California Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,549, issued on May 5, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Dynamic determination of a sample inspection recipe of charged particle beam inspection" was invented by Zhong-wei Chen (San Jose, Calif.), Jack Jau (Los Altos Hills, Calif.), Wei Fang (Milpitas, Calif.) and Chiyan Kuan (Danville, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a method comprising: determining parameters of a recipe of charged particle beam inspection of a region on a sample, based on a second set of characteristics of the sample; inspecting the region using the recipe."

The patent was filed on Sept. 25, 2018, under Applic...