ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,179, issued on March 31, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Metrology apparatus" was invented by Nitesh Pandey (Eindhoven, Netherlands), Arie Jeffrey Den Boef (Waalre, Netherlands), Duygu Akbulut (Eindhoven, Netherlands), Marinus Johannes Maria Van Dam (Venlo, Netherlands), Hans Butler (Best, Netherlands), Hugo Augustinus Joseph Cramer (Eindhoven, Netherlands), Engelbertus Antonius Fransiscus Van Der Pasch (Oirschot, Netherlands), Ferry Zijp (Nuenen, Netherlands), Jeroen Arnoldus Leonardus Johannes Raaymakers (Oirschot, Netherlands) and Marinus Petrus Reijnders (Eindhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Tradem...