US Patent Issued to ASML NETHERLANDS on March 3 for "Method for determining a field-of-view setting" (Dutch, French Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,385, issued on March 3, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Method for determining a field-of-view setting" was invented by Wim Tjibbo Tel (Veldhoven, Netherlands), Hermanus Adrianus Dillen (Veldhoven, Netherlands), Koen Thuijs (Vught, Netherlands), Laurent Michel Marcel Depre (Revel, France) and Christopher Prentice (Grenoble, France).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of determining a field of view setting for an inspection tool having a configurable field of view, the method including: obtaining a process margin distribution of features on at least part of a substrate; obtaining a threshold value; ...