US Patent Issued to ASML Netherlands on June 23 for "Vibration damping and resonance reduction for ion pump" (Dutch, American Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,177, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Vibration damping and resonance reduction for ion pump" was invented by Chenxi Fu (San Jose, Calif.), Long Di (San Jose, Calif.), Lucas Kuindersma (Eindhoven, Netherlands), Kuo-Feng Tseng (San Jose, Calif.), Peter Paul Hempenius (San Jose, Calif.), Yu Liu (San Jose, Calif.) and Ying Luo (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatuses and systems for damping vibration of a vacuum vessel mounted with a pump include a pump body and a damping element coupled to the pump body, wherein the pump body and the damping element form a mass-base...