US Patent Issued to ASML Netherlands on June 23 for "Alignment determination method and computer program" (Dutch Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,164, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Alignment determination method and computer program" was invented by Erwin Slot (Zoetermeer, Netherlands), Niels Vergeer (Rotterdam, Netherlands) and Vincent Sylvester Kuiper (Monster, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention concerns a method of determining alignment of electron optical components in a charged particle apparatus. The charged particle apparatus comprising: an aperture array and a detector configured to detect charged particles corresponding to beamlets that pass through the corresponding apertures in the a...