US Patent Issued to ASML NETHERLANDS on June 2 for "Transmissive diffraction grating" (Dutch Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,645,017, issued on June 2, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Transmissive diffraction grating" was invented by Derick Yun Chek Chong ('S Hertogenbosch, Netherlands), Wouter Joep Engelen (Eindhoven, Netherlands), Vyacheslav Kachkanov (Steensel, Netherlands), Vahid Mohammadi (Eindhoven, Netherlands) and Pieter Cristiaan De Groot (Heeze, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A transmissive diffraction grating for a phase-stepping measurement system for determining an aberration map for a projection system comprises an absorbing layer. The diffraction grating is for use with radiation having a first wavelen...