US Patent Issued to ASML Netherlands on June 2 for "High accuracy temperature-compensated piezoresistive position sensing system" (Belgian, Dutch, American Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,645,069, issued on June 2, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"High accuracy temperature-compensated piezoresistive position sensing system" was invented by Luc Roger Simonne Haspeslagh (Linden, Belgium), Nitesh Pandey (Silicon Valley, Calif.), Ties Wouter Van Der Woord (Eindhoven, Netherlands), Halil Gokay Yegen (Eindhoven, Netherlands), Sebastianus Adrianus Goorden (Eindhoven, Netherlands), Alexis Humblet (Liege, Belgium), Alexander Ludwig Klein (Eindhoven, Netherlands), Jim Vincent Overkamp (Eindhoven, Netherlands), Guilherme Brondani Torri (Leuven, Belgium) and Edgar Alberto Osorio Oliveros (Eindhoven, Netherlands).

According to the abstract* released ...