ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,602, issued on July 28, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Systems and methods for distributing light delivery" was invented by Jasper Winters (Nieuw Vennep, Netherlands), Erwin John Van Zwet (Pijnacker, Netherlands), Marcus Johannes Van Der Lans (Hillegom, Netherlands), Pieter Willem Herman De Jager (Middelbeers, Netherlands) and Geerten Frans Ijsbrand Kramer (Veldhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for improved sequencing of light delivery in a lithographic process includes determining a sequence of intensities of light to be delivered that includes an interval within the sequenc...