US Patent Issued to ASML NETHERLANDS on July 28 for "Self-referencing health monitoring system for multi-beam SEM tools" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,053, issued on July 28, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Self-referencing health monitoring system for multi-beam SEM tools" was invented by Wei Fang (Milpitas, Calif.) and Lingling Pu (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for image enhancement are disclosed. A method for enhancing an image may include receiving records of a performance metric for beams of the multi-beam system in an imaging process, each record associated with a beam. The method may also include determining whether an abnormality of a beam occurs based on a baseline value determined using a portion of th...