ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,334, issued on Feb. 24, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Multi-beam charged particle column" was invented by Vincent Claude Beugin (Nootdorp, Netherlands), Stijn Wilem Herman Karel Steenbrink (The Hague, Netherlands), Martin Ebert (Fremont, Calif.), Diego Martinez Negrete Gasque (Delft, Netherlands), Hindrik Willem Mook (The Hague, Netherlands) and Albertus Victor Gerardus Mangnus (Eindhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a multi-beam charged particle column configured to project a multi-beam of charged particles towards a target, the multi-beam charged particle column ...