US Patent Issued to ASML NETHERLANDS on Aug. 25 for "Methods of determining process models by machine learning" (Dutch, American Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,243, issued on Aug. 25, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Methods of determining process models by machine learning" was invented by Ya Luo (Veldhoven, Netherlands), Yu Cao (Saratoga, Calif.), Jen-Shiang Wang (Sunnyvale, Calif.) and Yen-Wen Lu (Saratoga, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods of determining, and using, a process model that is a machine learning model. The process model is trained partially based on simulation or based on a non-machine learning model. The training data may include inputs obtained from a design layout, patterning process measurements, and image measurements."

The ...