US Patent Issued to ASML Netherlands on April 7 for "Modular wafer table and methods of manufacturing thereof" (Dutch, American Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,308, issued on April 7, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Modular wafer table and methods of manufacturing thereof" was invented by Shahab Shervin (Norwalk, Conn.), Tammo Uitterdijk (Wilton, Conn.), Matthew Lipson (Stamford, Conn.) and Marcus Martinus Petrus Adrianus Vermeulen (Leende, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to a modular wafer table and methods for refurbishing a scrapped wafer to manufacture the modular wafer table. The method comprises removing one or more burls from a surface of a wafer table; polishing the surface of the wafer table after removi...