ALEXANDRIA, Va., April 21 -- United States Patent no. 12,607,938, issued on April 21, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).
"Imaging system" was invented by Albertus Hartgers (Berkel-Enschot, Netherlands), Marco Matheus Louis Steeghs (Sevenum, Netherlands), Gerardus Hubertus Petrus Maria Swinkels (Eindhoven, Netherlands), Giovanni Imponente (Eindhoven, Netherlands), Nicholas William Maria Plantz (Tilburg, Netherlands), Wouter Joep Engelen (Eindhoven, Netherlands) and Marcus Adrianus Van De Kerkhof (Helmond, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plate for use in an imaging system to determine at least two optical properties of an illumination beam of the imagin...