US Patent Issued to ASML NETHERLANDS, ASML HOLDING on May 19 for "Metrology system and coherence adjusters" (Dutch, American Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,631,968, issued on May 19, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands) and ASML HOLDING N.V. (Veldhoven, Netherlands).

"Metrology system and coherence adjusters" was invented by Sergei Sokolov (Eindhoven, Netherlands), Simon Reinald Huisman (Eindhoven, Netherlands), Jin Lian (Eindhoven, Netherlands), Sebastianus Adrianus Goorden (Eindhoven, Netherlands), Muhsin Eralp (Bethel, Conn.), Henricus Petrus Maria Pellemans (Veldhoven, Netherlands) and Justin Lloyd Kreuzer (Trumbull, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A metrology system (400) includes a multi-source radiation system. The multi-source radiation system includes ...