US Patent Issued to ASML HOLDING on Aug. 25 for "Split double sided wafer and reticle clamps" (Connecticut Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,249, issued on Aug. 25, was assigned to ASML HOLDING N.V. (Veldhoven, Netherlands).

"Split double sided wafer and reticle clamps" was invented by Matthew Lipson (Stamford, Conn.), Eric Justin Monkman (Fairfield, Conn.) and Victor Antonio Perez-Falcon (Bridgeport, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrode...