US Patent Issued to ASM IP Holding on Sept. 15 for "Pressure-based sensor system for precursor level measurement and method therefor" (Finnish, Belgian Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,736,383, issued on Sept. 15, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Pressure-based sensor system for precursor level measurement and method therefor" was invented by Kenneth Honniball (Kessel-Lo, Belgium), Giuseppe Alessio Verni (Vantaa, Finland) and Viljami Pore (Helsinki).

According to the abstract* released by the U.S. Patent & Trademark Office: "A pressure-based sensor system is described by which the amount of solid precursor in a precursor vessel for a semiconductor manufacturing process can be determined. The system comprises at least two fluidly connected chambers having a known volume, and a pressure sensor configured to measure a plurality of pressures...