ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,787, issued on Oct. 20, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"System for processing semiconductor wafer storage cassettes, combinations, and method of transporting" was invented by Erik ter Vrugt (Rheden, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system for processing semiconductor wafer storage cassettes, comprising: a vertical batch furnace assembly configured to process a semiconductor wafer storage cassette, the vertical batch furnace assembly comprising a vertical batch furnace configured to process wafers from the cassette. The system may further comprise a floor assembly arranged at the vertical batch ...