US Patent Issued to ASM IP Holding on Oct. 20 for "Method to reduce bending of features on a surface of a substrate and structure formed using same" (Arizona Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,754, issued on Oct. 20, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method to reduce bending of features on a surface of a substrate and structure formed using same" was invented by Jaebeom Lee (Tempe, Ariz.), Charith Eranga Nanayakkara (Tempe, Ariz.), Roghayyeh Lotfi (Scottsdale, Ariz.) and Paul Ma (Scottsdale, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods for forming structures with reduced feature (e.g., line) bending are provided. Exemplary methods include using a cyclic deposition process, forming a layer comprising one or more of molybdenum, tungsten, and ruthenium, and providing a nitrogen-containing reactant to...