ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,475, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Vented susceptor" was invented by Uday Kiran Rokkam (San Diego), Sam Kim (Chandler, Ariz.), Saket Rathi (Santa Clara, Calif.) and Dakai Bian (Tempe, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor can include a generally circular shape and may include an inner and outer susceptor. The outer susceptor can include a support region having one or more support mechanisms as well as a channel region extending from the region boundary to an outer radial boundary radially inward of an outer edge of the susceptor, the channel region can include a plurality of c...