US Patent Issued to ASM IP Holding on May 12 for "Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods" (Japanese Inventor)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,628,603, issued on May 12, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods" was invented by Yoshio Susa (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for dispensing a vapor phase reactant to a reaction chamber is disclosed. The apparatus may include: a vessel having an inner volume configured to contain a liquid chemical; an array of sensors configured for detecting a fill level of the liquid chemical disposed within the inner volume, wherein the array of sensors are vertically distributed within the inner volume with a...