US Patent Issued to ASM IP Holding on May 12 for "Methods for providing a precursor mixture to a reaction chamber" (Belgian Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,624,442, issued on May 12, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Methods for providing a precursor mixture to a reaction chamber" was invented by Rene Henricus Jozef Vervuurt (Leuven, Belgium) and Timothee Blanquart (Oud-Heverlee, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects described herein provide a method of providing a precursor mixture of a first precursor and a second precursor to a reaction chamber. The method may comprise maintaining the first precursor in the first precursor vessel at a first precursor temperature and the second precursor in the second precursor vessel at a second precursor temperature. Fl...