ALEXANDRIA, Va., March 3 -- United States Patent no. 12,564,871, issued on March 3, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Cleaning fixture for showerhead assemblies" was invented by Dinkar Nandwana (Chandler, Ariz.), Allen D'Ambra (Phoenix), Dinh Tran (Tempe, Ariz.), Ankit Kimtee (Phoenix) and Eric Shero (Phoenix).
According to the abstract* released by the U.S. Patent & Trademark Office: "Cleaning fixtures for cleaning a showerhead assembly are disclosure. The cleaning fixtures include: a fixture body incorporating three or more cavities, each cavity being separate from an adjacent cavity by a partition, and a number of channels associated with each cavity for fluidly connecting the cavities with an upper surface of...