US Patent Issued to ASM IP Holding on March 17 for "Methods and assemblies for selectively depositing molybdenum" (Belgian, American, Finnish Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,659, issued on March 17, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Methods and assemblies for selectively depositing molybdenum" was invented by Chiyu Zhu (Helsinki), Sukanya Datta (Phoenix) and Jan Willem Maes (Wilrijk, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to methods of selectively depositing material comprising molybdenum on a first surface of a substrate relative to a second surface of the substrate by a cyclic deposition process. The methods comprise providing a substrate in a reaction chamber, and performing at least one super-cycle comprising a halide sub-cycle and an oxyhalide sub-cy...