US Patent Issued to ASM IP Holding on March 17 for "Endpoint detection method for chamber component refurbishment" (Arizona, California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,184, issued on March 17, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Endpoint detection method for chamber component refurbishment" was invented by Dinkar Nandwana (Chandler, Ariz.), Dinh Tran (Tempe, Ariz.), Allen D'Ambra (Phoenix), Gary Powell (Petaluma, Calif.) and Christopher Falcone (Chandler, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An endpoint detection system for use in detecting an endpoint of a refurbishment process for process chamber components. The refurbishment process involves use of an etchant bath to etch or clean chamber components after their use a reaction chamber in semiconductor processing to remove...