US Patent Issued to ASM IP Holding on March 17 for "Castable aluminum alloys for wafer handling chambers in semiconductor processing systems" (Arizona, California, Texas Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,638, issued on March 17, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Castable aluminum alloys for wafer handling chambers in semiconductor processing systems" was invented by Joaquin Aguilar Santillan (Gilbert, Ariz.), Hong Gao (San Jose, Calif.), Shanker Kuttath (Austin, Texas), Shaofeng Chen (Austin, Texas), Gary Urban Keppers (Morgan Hill, Calif.) and Felix Rabinovich (Scottsdale, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constit...