US Patent Issued to ASM IP Holding on June 9 for "Method for seasoning a chamber" (South Korean Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,649,969, issued on June 9, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method for seasoning a chamber" was invented by YongWoong Jeong (Hwaseong-si, South Korea), HakJoo Lee (Hwaseong-si, South Korea), KiKang Kim (Yongin-si, South Korea), JongHyun Ahn (Hwaseong-si, South Korea), YoungMin Kim (Hwaseong-si, South Korea) and YoungSim Kim (Seongnam-Si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a method for seasoning a reactor in which a dry cleaning step and a first seasoning step are carried out at the first temperature, then the temperature is raised to a second temperature. The method also comprises a second se...