US Patent Issued to ASM IP Holding on June 30 for "Semiconductor processing apparatus with enhanced chamber usability and the method thereof" (Japanese Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,511, issued on June 30, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Semiconductor processing apparatus with enhanced chamber usability and the method thereof" was invented by Yoshiyuki Umeoka (Fuchu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer processing apparatus comprises first and second loadlocks, a first wafer handling chamber comprising a first robot, pass-through chamber comprising upper and lower slots, a second wafer handling chamber comprising a second robot, and a scheduling unit configured to schedule movements of wafers by the first and second robots. The scheduling unit is configured to schedule the fir...