ALEXANDRIA, Va., June 16 -- United States Patent no. D1,130,338, issued on June 16, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Electrostatic chuck" was invented by Hoyoun Jang (Hwaseong-si, South Korea) and Gopu Krishna (Hwaseong-si, South Korea).
The patent was filed on May 31, 2023, under Application No. D/893,602.
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