US Patent Issued to ASM IP Holding on July 21 for "Methods and systems for filling a gap" (Belgian, Finnish Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,399, issued on July 21, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Methods and systems for filling a gap" was invented by Timothee Blanquart (Oud-Heverlee, Belgium), Rene Henricus Jozef Vervuurt (Leuven, Belgium), Giuseppe Alessio Verni (Jodoigne, Belgium), Ren-Jie Chang (Leuven, Belgium), Charles Dezelah (Helsinki), Qi Xie (Wilsele, Belgium) and Viljami Pore (Helsinki).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are methods and systems for filling a gap. An exemplary method comprises providing a substrate to a reaction chamber. The substrate comprises the gap. The method further comprises forming a gap filling process b...