US Patent Issued to ASM IP Holding on Feb. 24 for "Vapor delivery apparatus, associated vapor phase reactor and methods of use" (Arizona Inventor)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,558,661, issued on Feb. 24, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Vapor delivery apparatus, associated vapor phase reactor and methods of use" was invented by Leonard Rodriguez (Phoenix).

According to the abstract* released by the U.S. Patent & Trademark Office: "Vapor delivery apparatus configured for generating a gaseous precursor from solid source precursor particles in a fluidized bed are disclosed. In addition, vapor phase reactors including a vapor delivery apparatus including a fluidized bed of solid precursor are also disclosed. Methods for monitoring and a controlling a vapor delivery system including a fluidized bed also disclosed."

The patent was fil...