ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,082, issued on Aug. 25, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Gas injector assembly" was invented by Theodorus G.M. Oosterlaken (Oudewater, Netherlands), Kelly Houben (Lubbeek, Belgium), Herbert Terhorst (Amersfoort, Netherlands) and Cornelis Herbschleb (Leiden, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A gas injector assembly and a substrate processing apparatus comprising the gas injector assembly is disclosed. Embodiments of the presently described gas injector assembly comprise a gas injector, a first precursor gas supply conduit and a second precursor gas supply conduit. A size of the first precursor gas s...