ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,938, issued on Aug. 11, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Susceptor for semiconductor substrate processing" was invented by Saket Rathi (Tempe, Ariz.), Shiva K.T. Rajavelu Muralidhar (Tempe, Ariz.), Siyao Luan (Phoenix), Alexandros Demos (Scottsdale, Ariz.) and Xing Lin (Chandler, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor for semiconductor substrate processing is disclosed herein. In some embodiments, the susceptor may comprise an inner susceptor portion and an outer susceptor portion. The susceptor portions may self-align via complementary features, such as tabs on the outer susceptor and recesses on...