US Patent Issued to ASM IP Holding on April 7 for "Showerhead and substrate processing apparatus using the same" (South Korean Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,595,561, issued on April 7, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Showerhead and substrate processing apparatus using the same" was invented by KyungEun Lee (Suwon-si, South Korea), HaRim Kim (Hwaseong-si, South Korea) and IkDu Nam (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A showerhead for supplying a gas includes a showerhead body having an upper surface and a lower surface opposite to the upper surface, and a plurality of through-holes formed in the showerhead body so that the gas passes through from the upper surface toward the lower surface, wherein a size of a cross-sectional area of each through...