ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,558,757, issued on Feb. 24, was assigned to ASM America Inc. (Phoenix).
"Planarized membrane and methods for substrate processing systems" was invented by Daniel Ray Trojan (Chandler, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method and a system for planarizing a membrane is disclosed. In one aspect, the method includes providing a resilient membrane and planarizing the surface of the membrane with a conditioning tool. The planarized membrane may be used in chemical mechanical planarization of a wafer. The method further includes finishing the surface of a wafer with the planarized membrane."
The patent was filed on May 23, 2023, under App...