US Patent Issued to Applied Materials on Sept. 8 for "Multi-zone platen temperature control" (Massachusetts Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,436, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Multi-zone platen temperature control" was invented by Kevin R. Anglin (Beverly, Mass.) and Simon Ruffell (Hamilton, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for etching workpieces in a uniform manner are disclosed. The system includes a semiconductor processing system that generates a ribbon ion beam, and a workpiece holder that scans the workpiece through the ribbon ion beam. The workpiece holder includes a plurality of independently controlled thermal zones so that the temperature of different regions of the workpiece may be sepa...