US Patent Issued to Applied Materials on Sept. 8 for "Fluid vapor mixing and delivery system" (California Inventor)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,728,446, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Fluid vapor mixing and delivery system" was invented by Edwin Velazquez (Union City, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for delivering IPA vapor to a substrate processing chamber. In one aspect, the invention includes a controller, a liquid mass flow controller (LMFC) associated with a vaporizer to convert a first fluid to a vapor, a mass flow controller (MFC) associated with the carrier gas, a mixing unit to mix the vapor with the carrier gas to create the predetermined mixture and a drain circuit including a first flow p...