US Patent Issued to Applied Materials on Sept. 8 for "Cassette structures and related methods for batch processing in epitaxial deposition operations" (American, Indian Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,452, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cassette structures and related methods for batch processing in epitaxial deposition operations" was invented by Vishwas Kumar Pandey (Madhya Pradesh, India), Kartik Bhupendra Shah (Saratoga, Calif.) and Ala Moradian (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to cassette structures and related methods for batch processing in epitaxial deposition operations. In one implementation, a cassette configured for disposition in a substrate processing chamber includes a first wall, a second wall spaced from the first wa...