US Patent Issued to Applied Materials on Sept. 29 for "Corrosion resistant polymer coatings for manufacturing equipment components" (California Inventor)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,658, issued on Sept. 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Corrosion resistant polymer coatings for manufacturing equipment components" was invented by Vijay D. Parkhe (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A chamber component for a semiconductor processing chamber includes a body. The chamber component also includes a coating. The coating is a corrosion-resistant coating. The coating is deposited on a surface of the body. The corrosion-resistant coating includes a perfluoroelastomer material."

The patent was filed on Dec. 7, 2022, under Application No. 18/077,138.

*For further information, i...