US Patent Issued to Applied Materials on Sept. 22 for "Cleaning assemblies for substrate processing chambers" (Indian, Singaporean, American Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,238, issued on Sept. 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cleaning assemblies for substrate processing chambers" was invented by Yuxing Zhang (Santa Clara, Calif.), Tuan Anh Nguyen (San Jose, Calif.), Amit Kumar Bansal (Milpitas, Calif.), Nitin Pathak (Mumbai, India), Saket Rathi (Santa Clara, Calif.), Thomas Rubio (Santa Clara, Calif.), Udit S. Kotagi (Singapore), Badri N. Ramamurthi (Los Gatos, Calif.) and Dharma Ratnam Srichurnam (Bengaluru, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to cleaning assemblies, components thereof, and methods associated therewith for substrate pr...