ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,455, issued on Sept. 15, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"RF power splitting and control" was invented by David Coumou (Webster, N.Y.), Dennis Brown (Pittsford, N.Y.) and Jacob Harrell (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include an apparatus that includes a radio frequency (RF) power supply, and a power splitter electrically coupled to the RF power supply. In an embodiment, the apparatus includes a plurality of impedance matches electrically coupled to the power splitter, where the power splitter is configured to split RF power from the RF power supply in ord...