US Patent Issued to Applied Materials on Sept. 15 for "Grooves for edge and hot spot compensation in chemical mechanical polishing" (California Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,734,638, issued on Sept. 15, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Grooves for edge and hot spot compensation in chemical mechanical polishing" was invented by Zhize Zhu (Cupertino, Calif.), Brian J. Brown (Palo Alto, Calif.), Christopher Heung-Gyun Lee (San Jose, Calif.), Huyen Tran (San Jose, Calif.), Huanbo Zhang (Santa Clara, Calif.), Eric Lau (Santa Clara, Calif.) and Ekaterina A. Mikhaylichenko (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for chemical mechanical polishing includes rotating a polishing pad about an axis of rotation, positioning a substrate against the polishing pad, dispensing ...