US Patent Issued to Applied Materials on Sept. 1 for "Chamber port assembly" (California Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,723,303, issued on Sept. 1, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Chamber port assembly" was invented by Ralph P. Antonio (Santa Clara, Calif.), Daisuke Tanaka (Los Gatos, Calif.), Peter Lai (Santa Clara, Calif.), Kaushik Rao (Santa Clara, Calif.), Sudhir R. Gondhalekar (Fremont, Calif.) and Paul Emerick (Richmond, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for a substrate processing system includes a chamber port assembly configured to connect between respective first and second chambers of a substrate processing system. The chamber port assembly includes a body with openings disposed on opposin...