US Patent Issued to Applied Materials on Oct. 27 for "Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCS) of a substrate processing system" (American, Indian Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,774,911, issued on Oct. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCS) of a substrate processing system" was invented by Bindusagar Marath Sankarathodi (San Jose, Calif.), Zhiyuan Ye (San Jose, Calif.), Jyothi Rajeevan (Bangalore, India), Ala Moradian (Sunnyvale, Calif.), Zuoming Zhu (Sunnyvale, Calif.), Errol Antonio C. Sanchez (Tracy, Calif.) and Patricia M. Liu (Saratoga, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects generally relate to methods, systems, and apparatus for conducting a calibration o...