US Patent Issued to Applied Materials on Oct. 27 for "High performance CMP multidisk apparatus" (California Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,773,756, issued on Oct. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"High performance CMP multidisk apparatus" was invented by Nai-Chieh Huang (Mountain View, Calif.), Akshay Aravindan (Sunnyvale, Calif.), Shih-Haur Shen (Sunnyvale, Calif.), Jianshe Tang (San Jose, Calif.), Jay Gurusamy (Santa Clara, Calif.), Chen-Wei Chang (San Jose, Calif.), Chih-Han Yang (Emeryville, Calif.) and Wei Lu (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system may include a gimbal defining a plurality of pockets, where each pocket may include a first portion and a second portion that extends between the first portion and a base of ...