US Patent Issued to Applied Materials on Oct. 27 for "Electrostatic chuck with metal shaft" (California Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,774,524, issued on Oct. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Electrostatic chuck with metal shaft" was invented by Vijay D. Parkhe (San Jose, Calif.) and Ashutosh Agarwal (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Electrostatic chucks (ESCs) for plasma processing chambers, and methods of fabricating ESCs, are described. In an example, a substrate support assembly includes a ceramic bottom plate, a ceramic top plate, and a bond layer between the ceramic top plate and the ceramic bottom plate, the ceramic top plate in direct contact with the bond layer, and the bond layer in direct contact with the ceram...