US Patent Issued to Applied Materials on Oct. 27 for "Advanced barrier nickel oxide (BNiO) coating development for the process chamber components" (California Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,774,526, issued on Oct. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Advanced barrier nickel oxide (BNiO) coating development for the process chamber components" was invented by Laksheswar Kalita (San Jose, Calif.) and Joseph Behnke (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by treating the chamber component with an oxidizing agent comprising hydrofluoric acid and/or nitric acid"

The patent was filed on March 4, 2024, under ...