ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,768,798, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Polarized imaging reflectometer" was invented by Eric Chin Hong Ng (Livermore, Calif.), Todd Egan (Fremont, Calif.) and Mehdi Vaez-Iravani (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein relate to an apparatus that includes a light engine with a plurality of light sources. In an embodiment, each of the plurality of light sources is configured to emit a spectral band with different wavelength bandwidth. The apparatus may also include a beam splitter that is optically coupled to the light engine, where the beam splitt...