US Patent Issued to Applied Materials on Oct. 20 for "Growth monitor system and methods for film deposition" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,761, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Growth monitor system and methods for film deposition" was invented by Zhepeng Cong (San Jose, Calif.), Mostafa Baghbanzadeh (Oakland, Calif.), Tao Sheng (Santa Clara, Calif.) and Enle Choo (Saratoga, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure generally relates to process chambers for semiconductor processing. In one embodiment, a growth monitor for substrate processing is provided. The growth monitor includes a sensor holder and a crystal disposed in the sensor holder having a front side and a back side. An opening is formed in t...