US Patent Issued to Applied Materials on Nov. 3 for "Ion source with wire form metal dopant" (Massachusetts Inventor)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,785,036, issued on Nov. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Ion source with wire form metal dopant" was invented by Roger B. Fish (Bedford, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ion source that includes a material delivery system to deliver a metal dopant in the form of a wire to the ion source is disclosed. The wire is introduced through an opening in one wall of the arc chamber and is sputtered or chemically etched by the plasma. The rate at which the wire is delivered may be controlled so as to maintain a desired beam current without causing any liquid metal to be spilled in the arc chamber. In some embo...